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Figure 12 from Air spacer for 10nm FinFET CMOS and beyond

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Figure 12 from Air spacer for 10nm FinFET CMOS and beyond

Electronics, Free Full-Text

Nanomaterials, Free Full-Text

DTCO flow for air spacer generation and its impact on power and

Impact of MOL/BEOL Air-Spacer on Parasitic Capacitance and Circuit Performance at 3 nm Node

Electronics, Free Full-Text

DTCO flow for air spacer generation and its impact on power and

Spacer FinFET: nanoscale double-gate CMOS technology for the terabit era - ScienceDirect

Impact of MOL/BEOL Air-Spacer on Parasitic Capacitance and Circuit

November, 2016

Impact of MOL/BEOL Air-Spacer on Parasitic Capacitance and Circuit