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• High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

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Deep Reactive Ion Etching (DRIE) - Oxford Instruments

Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

Figure 1 from Ultra Deep Reactive Ion Etching of High Aspect-Ratio

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PDF) Metal assisted chemical etching for high aspect ratio

PDF) Metal assisted chemical etching for high aspect ratio

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Micromachines, Free Full-Text