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Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

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Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Classification of the Categories of Amorphous Hydrogenated Silicon Oxynitride Films Using Infrared Spectroscopy

PDF] Moisture Resistance of Insulating Films for Compound Semiconductor Devices

PDF] Diffusion of Water Molecules in Amorphous Silica

Silicone encapsulation of thin-film SiOx, SiOxNyand SiC for modern electronic medical implants: a comparative long-term ageing study. - Abstract - Europe PMC

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Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma - ScienceDirect

Table 5 from Gas permeation in silicon-oxide / polymer ( SiO x / PET ) barrier films : role of the oxide lattice , nano-defects and macro-defects

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PDF) Stability of SiNx Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

PDF) Stability of SiNx Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

Silicone encapsulation of thin-film SiOx, SiOxNyand SiC for modern electronic medical implants: a comparative long-term ageing study. - Abstract - Europe PMC

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